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当前位置：新型化学反应与机制 > 2024年 1卷 (1)期

Open Access Article

Novel Chemical Reactions and Mechanisms. 2024; 1: (1) ; 13-17 ; DOI: 10.12208/j.ncrm.20240003.

Research on the Morphology of Lithium Aluminate Films Prepared by Laser Chemical Vapor Deposition
激光化学气相沉积制备铝酸锂薄膜的形貌研究

作者： Chi Chen *

武汉工程大学化工与制药学院湖北武汉

*通讯作者： Chi Chen,单位：武汉工程大学化工与制药学院湖北武汉；

湖北省教育厅项目“陶瓷电解质BASE的制备及性能研究”（编号005351）

发布时间: 2024-11-22 总浏览量: 124

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摘要

Li-Al-O体系中有LiAl₅O₈、LiAlO₂和Li₅AlO₄三种化合物，其中LiAlO₂因晶格失配度低、可去除性好，作为生长GaN半导体的潜在衬底受到越来越多的关注。LiAlO₂在聚变反应堆中作为固体氚增殖材料用于Li(n, a)T核反应生产氚燃料也具有重要意义，因为LiAlO₂在中子辐照下表现出高温稳定性，与结构材料具有良好的相容性。此外，LiAlO₂在973K下仍具有热化学稳定性，因此通常用作聚合物电解质的载体，形成熔融碳酸盐燃料电池（MCFC）中输送CO₃²-的隔膜。本文采用激光化学气相沉积法在多晶AlN衬底上制备了(110)和(004)取向的γ-LiAlO₂薄膜，沉积温度(Tdep)为1000–1300 K，锂/铝摩尔比(RLi/Al)为1.0–10，总压(Ptot)为100–200 Pa。(004)取向的γ-LiAlO₂薄膜由金字塔状晶粒和柱状结构组成，而(110)取向的γ-LiAlO₂薄膜则呈粒状和多边形柱状。γ-LiAlO₂薄膜的沉积速率可达60–90γm h-1。

关键词： 激光CVD；形貌；取向；薄膜

Abstract

The Li-Al-O system has three compounds of LiAl₅O₈,LiAlO₂and Li₅AlO₄. Among them, LiAlO₂ attracts increasing attention as a potential substrate for growing GaN semiconductor due to low lattice mismatch and removability. It is also of interest as a solid tritium breeding material to produce tritium fuel by the nuclear reaction of Li(n, a)T in a fusion reactor, since LiAlO₂ shows high-temperature stability and good compatibility with structural materials under irradiation with neutrons. Additionally, LiAlO₂ is thermochemically stable even at 973 K so that it is usually used as the support for the polymer electrolyte to form the diaphragm transporting CO₃²- in molten carbonate fuel cells (MCFC). In this paper, (110) and (004)-oriented γ-LiAlO₂ films were prepared on poly-crystalline AlN substrates by laser chemical vapor deposition atdeposition temperature (Tdep) of 1000–1300 K, molar ratio of Li/Al (RLi/Al) of 1.0–10 and lowtotal pressure (Ptot) of 100–200 Pa. The (004)-oriented γ-LiAlO₂ films consisted of pyramidal grains with acolumnar structure while (110)-oriented γ-LiAlO₂ films showed granular and polygonal column. The deposition rate of γ-LiAlO₂ films reached to 60–90γm h-1.

Key words： Laser CVD; Morphology; Orientation; Film

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引用本文

ChiChen, 激光化学气相沉积制备铝酸锂薄膜的形貌研究[J]. 新型化学反应与机制, 2024; 1: (1) : 13-17.

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